English 中文
About Us Product & Application Investor Relations Career CSR

关闭
Spectrum's craftsmanship is conveyed through high-quality materials and technology; the possibilities of gases in the field of application are endless.
Products Application Engineering Service
Industry application
SemiconductorsLiquid Crystal Displays (LCD)Light Emitting Diodes (LED)PV
Semiconductors
Clean
When contaminants such as metals and particles present on the wafer surface affect the performance and output of the equipment, the cleaning process is repeated before and after the process.
Products
NF3
Nitrogen Trifluoride
High purity Nitrogen Trifluoride purity：5N+
  • Molecular Weight: 71.01 g/mol
  • Boiling Point: -194.2 °F@1atm
  • CAS No.:7783-54-2
  • UN No: UN2451
    • F2/N2
    20%F2/N2 Fluorine bal Nitrogen
    High purity 20%F2/N2 Fluorine bal Nitrogen purity ：4N+（F2）/6N+（N2）
  • Molecular Weight: 38 g/mol（F2）/28.01 g/mol（N2）
  • Boiling Point: -306.6 °F@1atm（F2）/-320.44 °F@1atm（N2）
  • CAS No.:7782-41-4（F2）/7727-37-9（N2）
  • UN No: UN1045（F2）/UN1066（N2）