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Spectrum's craftsmanship is conveyed through high-quality materials and technology; the possibilities of gases in the field of application are endless.
Products Application Engineering Service
Industry application
SemiconductorsLiquid Crystal Displays (LCD)Light Emitting Diodes (LED)PV
Semiconductors
IMP
Ion implantation is the injection of impurity ions with high energy into a semiconductor substrate and is the most widely used mainstream doping process.
Products
Xe
Xenon
High purity Xenon gas purity：5N5+
  • Molecular Weight: 131.29 g/mol
  • Boiling Point: -162.62 °F@1atm
  • CAS No.:7440-63-3
  • UN No: UN2036
    •
    VAC® CO
    Carbon Monoxide
    High purity VAC®Carbon Monoxide purity：4N5+
  • Molecular Weight: 28.01 g/mol
  • Boiling Point: -312.61 g/mol
  • CAS No.:630-08-0
  • UN No: UN1016
    •
    VAC® GeF4/H2
    Germanium Tetrachloride bal Hydrogen
    High purity VAC®Germanium Tetrachloride bal Hydrogen purity:：4N+（GeF4）/5N+（H2）
  • Molecular Weight: 148.6 g/mol（GeF4）/2.02 g/mol（H2）
  • Boiling Point: -28.66 °F@1atm（GeF4）/-422.97 °F@1atm（H2）
  • CAS No.:7783-58-6（GeF4）/1333-74-0（H2）
  • UN No: UN3304（GeF4）/UN1049（H2）
    •
    VAC® 11BF3/H2
    Enrich Boron Trifluoride bal Hydrogen
    High purity VAC®Enrich Boron Trifluoride bal Hydrogen purity：4N+（11BF3）/5N+（H2）
  • Molecular Weight: 67.81 g/mol（11BF3）/2.02 g/mol（H2）
  • Boiling Point: -148 °F@1atm（11BF3）/-422.97 °F@1atm（H2）
  • CAS No.:7637-07-2（11BF3）/1333-74-0（H2）
  • UN No: UN3286（11BF3）/UN1049（H2）
    •
    SDS®3 11BF3
    SDS®3 Enriched Boron Trifluoride
    High purity SDS®3 Enriched Boron Trifluoride gas purity: 3N+
  • Molecular Weight: 77.95 g/mol
  • Boiling Point: -80.46 °F@1atm
  • CAS No.:7784-42-1
  • UN No: UN2188
    •
    SDS®3 PH3
    SDs®3 Phosphine
    High purity SDS®3 phosphane gas purity: 5N5+
  • Molecular Weight: 33.99 g/mol
  • Boiling Point: -125.9 °F@1atm
  • CAS No.:7803-51-2
  • UN No: UN2199
    •
    SDS®3 AsH3
    SDS®3 Arsine
    High purity SDS®3 Arsenane gas purity: 5N5+
  • Molecular Weight: 77.95 g/mol
  • Boiling Point: -80.46 °F@1atm
  • CAS No.:7784-42-1
  • UN No: UN2188
    •
    GeF4
    Germanium Tetrafluoride
    High purity GeF4 Germanium Tetrafluoride purity：4N+
  • Molecular Weight: 148.6 g/mol
  • Boiling Point: -28.66 °F@1atm
  • CAS No.:7783-58-6
  • UN No: UN3304